Differentially Pumped Rotary Feedthrough

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产品概述 Product Overview

Differentially Pumped Rotary Feedthrough allows two flanges to rotate concentricly, which can be used as a modular component for constructing UHV multi-axis manipulators. It provides primary rotation for other components and achieve 360° continuous rotation.

The feedthrough could be used for the applications including sample surface analysis (XPS, AES or SIMS), ion/neutral/atom scattering experiments, etc.

规格说明 Specification

● Manual/ Step Motor Actuator	● Precision Ball Bearings and Quality PTFE	● Rotation range: 360° continuous
● Bakeable to 150℃	● Laser Etched Scale in 1° Increments	● Two Stage Differential Pumping for UHV Performance
● Mounting flange on both sides: CF flange, tapped hole

Flange OD		Actuation	Resolution	Weight（Kg)	Part Number
mm	inch
114	4.5	Manual	0.1°	4.5	DPRF63M
		Step Motor	0.01°	6.1	DPRF63A
152	6	Manual	0.1°	9.2	DPRF100M
		Step Motor	0.01°	11.0	DPRF100A

产品尺寸 Dimension Drawing

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